Semiconductor Equipment & Process Consulting

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Consulting  -  Contract R&D

Custom Equipment Development

Productivity Enhancement Tools

                Semiconductor Industry

innovative Silicon Systems offers consulting, contract R&D, and custom equipment development services for the Semiconductor Industry in addition to a wide variety of innovative productivity enhancement tools.


iSiS  provides consulting services for semiconductor processing and semiconductor processing equipment design and enhancement to a world-wide customer base in a wide variety of disciplines including:  plasma etch, plasma strip, LPCVD, PECVD, in-situ cleaning and reactor design.

 Contract R&D and Custom Equipment Development

innovative Silicon Systems  offers a full range of services to help you develop the semiconductor equipment and processes you need to improve yield, reduce downtime, increase productivity, scale to the next wafer size, or to achieve the next level of device processing.  From consulting with your team to independent feasibility studies or complete prototype system design, construction, testing and process optimization, iSiS delivers results.

 Reverse Engineering

Looking for a second source supplier?  iSiS can reverse engineer and supply many non-patented products for you.  In most cases, we can improve the performance or lifetime of the part through superior design or new materials.

Productivity Enhancement Tools

innovative Silicon Systems  produces a line of productivity enhancement tools and system components that have been developed by iSiS in response to specific customer requests.  All of our products offer the highest level of design and performance - from the industry's safest wafer boat lift tools to wet-processing wafer cassettes made from the latest high performance plastics.   If you can't find that special tool to do a specific task, or would like to improve the performance or lifetime of an existing one - contact us and let us provide it!

innovative Silicon Systems has over 25 years of experience in semiconductor processing and semiconductor processing equipment.  President and Founder, Dr. David Benzing, was an industry pioneer in plasma etching, in-situ cleaning of semiconductor reactor chambers, and the use of NF3 in semiconductor processes. 

innovative Silicon Systems delivers quality products at competitive prices and superior customer service.






Customers Include:






Applied Materials


Lam Research

Mattson Technology

P1 Diamond

Plasma System Corp.

Ube Industries

MooHan Ltd.




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