innovative Silicon Systems is the exclusive source for AutoClean^TM in-situ LPCVD tube cleaning systems.

Benzing Technologies introduced AutoClean 10^TM, the first in-situ tube cleaning system for horizontal LPCVD tubes, in 1985 and followed that in 1990 with AutoClean Plus^TM, the first integrated in-situ tube cleaning system for both horizontal and vertical LPCVD tubes.  In 1997, AutoClean Thermal^TM was introduced, featuring integrated exhaust abatement . 

The AutoClean^TM series brings in-situ cleaning to your LPCVD tube!   No longer is it required to pull & replace your tube!  Your furnace can clean itself safely and effectively.  And because it takes less time, you can do it more frequently, reducing particle levels!

Contact us to learn how AutoClean Plus^TM can make your life simpler and more productive!.