Semiconductor Equipment and Process Consulting

Semiconductor Equipment & Process Consulting

Contract R&D and Equipment Development

innovative Silicon Systems has over 20 years experience and the expertise to assist you in developing the next generation tool or to resolve existing performance problems. We can provide a full range of services from consulting and feasibility studies to prototype system design, construction and testing. Some of our successful development programs include:

	300 mm Oxide Plasma Etch System
	Remote NF₃ and NH₃ Plasma Sources
	Single-Wafer Plasma Asher
	Flat Panel Plasma Asher
	Chromium Oxide MOCVD process
	Chrome Mask Plasma Etch System
	Automatic Slurry Mixing & Distribution System for CMP
	Effluent Abatement Systems
	In-situ chamber cleaning hardware and processes for: LPCVD, PECVD, W-CVD, Epitaxy, and Plasma Etch
	Reduced Volume POCl₃ System

Do you need help? Wish there was a better way or better tool? Contact Us and we can help solve your problems.

Home Products Services News

© 2005 innovative Silicon Systems