innovative Silicon Systems has just introduced an upgrade to standard OEM parts for GAMA^TM series automated wet benches.

Low profile carriers have achieved outstanding results for Pre-Diffusion cleanup and wet etch applications.  We take the product to the next level by offering the snap-in carrier rods in Halar^TM (ECTFE), reinforced with an encapsulated alumina or sapphire rod. 

Halar^TM is much more dense than the Teflon used in the standard OEM rods, yielding at least a 3X life cycle before maintenance in high concentrations of acids like HF.

innovative Silicon Systems can now supply replacement Halar^TM carriers for GAMA^TM series automated wet benches.

We offer three different styles of all-welded carriers to help match your existing equipment and your maintenance budget.  Fabricated from Halar^TM with encapsulated alumina or sapphire reinforcing rods, these carriers offer superior stability and performance over long periods of usage.  The carriers are available with different wafer slot patterns to help prevent spotting during drying, including the original slot design and in a slot design equivalent to that of the snap-in rods.

We also just introduced a Halar^TM carrier frame for use with the snap-in rods that is a direct replacement for the Teflon-coated quartz frame.   Our carrier frame uses six encapsulated stiffening rods for exceptional stability and, being made from Halar^TM, will not break or chip and has superior chemical resistance.

iSiS also offers two different versions of the single and double carrier pick-up fingers.  The fingers are made completely out of Kel-F to match all your chemical requirements.