CLAS^TM is a compact, easy to use Cantilever Laser Alignment System for horizontal furnace systems. Now cantilevers, load stations and furnace tubes can be aligned quickly and easily by a single person. No more "eyeball" alignments! No more craning your neck to see around the door into the tube! Best yet, no more broken tubes or poor process uniformity due to misalignment of the cantilever and tube! Just precise, quick alignments every time with CLAS^TM.

Centering of the laser beam is a snap! The self-centering target features a Plexiglas center plate with a small hole drilled in its center. When the laser strikes the center of the hole, a large diffraction pattern is generated at the hole and the outside edge of the plate illuminates, ensuring accurate alignment every time.

To use CLAS^TM simply attach the laser to the rear of the process tube and place the self-centering target in the front of the tube.  Clamp the CCD camera to the scavenger box and connect it to the monitor located near the laser.   Now a single user can view the laser beam impinging on the target with the monitor and, using the X-Y alignment screws, can adjust the direction of the beam until it strikes the center hole on the target. The laser beam is now precisely aligned along the axis of the tube. Place the Dummy Load Plates on the cantilever to provide the correct loading and set the Target Wafers set into wafer boats at the fore and aft of the load.  The cantilever assembly can now be adjusted so that the target wafers align with the laser beam.

Simple.  Easy to Use.  Accurate.  CLAS^TM offers you a complete solution to a troublesome problem.