innovative Silicon Systems Secur-Lok^TM Quartz Wafer Boats are specially designed for use with the iSiS Saf-Lok^TM, Sur-Lok^TM, and Sur-Lok II^TM Self-Locking Quartz Boat Handle and the standard series of Norton^TM Silicon Carbide paddles.  The boat can be used for low, medium, and high temperature process applications in both atmospheric and LPCVD horizontal furnaces.

The boat’s unique footprint and upper rail design allow only contact between the bottom of the quartz boat and the bottom flat of the SiC paddle.  Eliminating contact between the rail support bands and the paddle wings greatly reduces boat warpage caused by long process cycles at high temperatures.  The design also helps to reduce particles due to quartz chips which are common to conventional and shell-shaped quartz boats which contact the paddle wings.

Secur-Lok^TM quartz boats are available exclusively from iSiS.

The Secur-Lok^TM line of quartz wafer boats are covered by US Patent 6669253.