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Products
Services
News
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innovative Silicon Systems
offers a
variety of productivity enhancement tools and components for horizontal and
vertical furnace applications, and for pre-diffusion and wet etch processes.
If you don't see it here, contact us and make a request.
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AutoCleanTM
- Discover a unique patented process that
performs in-situ LPCVD process tube cleaning.
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CLASTM
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Cantilever Laser
Alignment System
- CLASTM
is a compact, easy to use Cantilever Laser Alignment System for horizontal
furnace systems.
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VTR7000 - Products and Upgrades
- Enhance your BEU with the new Geneva Drive. Stop door seal
problems with Spring Loaded Door Struts.
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Parts for DirectionTM
Cantilever Assemblies
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We offer a
complete line of replacement parts and upgrades for the DirectionTM line of
cantilevers and cantilever heads.
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Improved Trolleys for Atmoscan®
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Update your Atmoscan®
with new swivel Trolleys.
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Silicon Carbide
Wafer
Boat Handles
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Saf-LokTM,
Sur-LokTM
&
Sur-Lok IITM
Self-Locking SiC Wafer Boat Handles are specially designed for the standard series
of NortonTM
Silicon Carbide Contiguous Boats and Half-Contiguous Boats.
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Quartz
Wafer Boat Handles
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Saf-LokTM,
Sur-LokTM
&
Sur-Lok IITM
Self-Locking Quartz Wafer Boat Handles are specially designed for
the Secur-LokTM
series of Quartz Contiguous Boats and Half-Contiguous Boats.
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Quartz Wafer Boats
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The Secur-LokTM
series of Quartz Contiguous Boats and Half-Contiguous Boats offers improved performance characteristics and is
designed for use with the
Saf-LokTM
and
Sur-LokTM
series of Self-Locking
Quartz Wafer Boat Handles.
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Platforms
for PersysTM
External Steam Torch
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Need to expand your external torches? We offer second source platforms
that work with the PersysTM
external torch systems.
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HalarTM Rods,
HalarTM Wafer Carriers,
& Pick-Up Fingers
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If you
want an alternative to expensive OEM parts, try our advanced-designed
removable HalarTM rods and
wafer carries for GAMATM
style automated wet benches. We also have available the Kel-F pickup
fingers.
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Water Flow
Monitors & Controllers
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iSiS
introduces a new line of low-cost cooling MFM - Water Flow Monitors
(Multi-Channel) and FlowGuard - Water Flow Monitors (Single-Channel) with the all
the features of the more expensive models. Also available is the FTC,
a vaccum flange temperature controller.
The FTC
monitors the temperature of the flange and adjusts the cooling water flow
accordingly to maintain a constant flange temperature. What could be
simpler?
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Aluminum Wafers
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We offer a complete line
of
Aluminum wafers in a
wide range of colors. They are perfect to use as test wafers for wafer
handling set-up, alignment and testing. Almost any color or
combination of colors as well as artwork, logos or message can be
permanently applied to an Aluminum wafer through our custom anodization
process.
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Vacuum-Lock Door
Controller
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Vacuum-Lock Doors are
employed on horizontal furnace process tubes where a positive door seal is
critical, such as with H2 Anneal and Polysilicon deposition processes.
Now available are the 300 Series Vacuum-Lock Door (VLD) Controller and the
500 Series High Precision Analog Vacuum-Lock Door (VLD) Controller.
Our VLD controller allows you to monitor and control the vacuum-locked door
seal on your vacuum flanges.
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