innovative Silicon Systems introduces two new lines of Vacuum Lock Door (VLD) controllers, the Series 300 and Series 500.  These VLD Controllers integrate a 3-way remotely actuated valve with a vacuum switch to provide easy and dependable VLD performance.

Vacuum-Lock Doors are employed on horizontal furnace process tubes where a positive door seal is critical, such as with H2 Anneal and Polysilicon deposition processes.  The tube flange is typically configured with an annular channel between two o-rings.  When the door is closed against the tube flange, vacuum is applied to the annulus, establishing a positive door to flange seal that can be verified by monitoring the vacuum level in the annulus. At the end of the process, the annular space is vented back to atmosphere, allowing the door to be opened.  This application of vacuum and vent to the VLD is performed by the 3-way valve in the iSiS Controllers via a signal from the Host system which can be either a contact closure or a 24VDC High logic signal.

Positive indication of a vacuum level in the VLD is performed by a vacuum switch in the Series 300 Controllers, providing a contact closure to the Host when the vacuum level is below a user-adjustable setpoint.

The Series 500 Controllers VLD Controllers offers even more features including a second setpoint for vent indication, a 3½ digit display of vacuum level and an analog output of vacuum level for performance monitoring.

Simplify and improve the performance of your VLD with an iSiS VLD Controller!  Don’t have a VLD?  Contact us and we’ll show you how a VLD from InVac Systems together with one of our VLD Controllers can improve process safety and performance!