innovative Silicon Systems now can offer you a complete retrofit kit for your VTR7000 Boat Exchange Unit (BEU).  This advancement is part of the original OEM AIP kit (Automation Improvement Kit).

The Geneva Drive upgrade is a pneumatic driven turntable that replaces the original factory system. The standard BEU drive unit on a VTR7000 includes a stepper motor and two timing belts which are prone to failure, require proper tensioning, and generate particles. The original H-plate on which supports the wafer towers is thin and can flex under full loads causing misalignment.

The Geneva Drive gives increased support for the process boat, reducing deflection and error, which allows the customer longer periods between required boat calibrations. This upgrade is a great enhancement for OEE and uptime on vertical furnaces.

innovative Silicon Systems has a solution for your intermittent door seal problems - Spring Loaded Door Struts.

Improve your sealing capability on LPCVD and Atmospheric VTR's with Spring Loaded Door Struts.  Each door requires two door supports and one locating door strut. 

Spring Loaded Door Struts will help to eliminate cracking and splintering of quartz pedestal feet on Atmospheric systems.  The spring loaded action still allows for proper sealing pressure for your Tursite seal and o-ring without over-compression that can cause premature failure and burning of the seals.

On LPCVD systems, Spring Loaded Door Struts provide an even distribution of compression of the door plate to the vacuum flange, eliminating over-compression and o-ring deformation. Over-compression can result in o-ring "sticking", where the o-ring melts to the vacuum flange and door.