Semiconductor Equipment and Process Consulting by innovative Silicon Systems

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MFM - Water Flow Monitor (Multi-Channel)

Control your process cooling water flow with new digital monitoring.

innovative Silicon Systems introduces a new line of low-cost cooling water flow monitors with the all the features of the more expensive models. The Multi-Channel Flow Monitor (MFM) Series of flow sensors are capable of measuring extremely low flow rates from 0.3 GPH to 32 GPH on 2-6 flow legs. For each flow leg, the unit provides a two digit LED readout of flow, a user-adjustable alarm setpoint, a 0-5V analog output signal and a digital alarm output signal.

Each flow leg in the MFM Series is plumbed in stainless steel with a locking metering valve to adjust and set the desired flow and is available with either 1/4” or 3/8” tube compression fittings.

Each leg of the MFM can be configured for one of the three different standard flow rate ranges:

	0.3 - 3.2 GPH (20 - 200 ml/min)
	1.0 - 16 GPH (60 - 1000 ml/min)
	3.2 - 32 GPH (200 - 2000 ml/min)

Download or print a Multi-Channel Flow Monitor Brochure (PDF Format)

FlowGuard - Water Flow Monitor

An individual flow sensor unit to control your process cooling water flow.

innovative Silicon Systems introduces a new line of low-cost cooling water flow monitors with the all the features of the more expensive models. The FlowGuard is capable of measuring extremely low flow rates from 0.3 GPH to 32 GPH and provides a two digit LED put readout of flow, a user-settable alarm, a 0-5V analog output signal and a digital alarm output signal.

The flow sensor is small and uses a Pelton-type turbine wheel to determine the flow rate of the water. The rotation rate of the turbine wheel is linear over a large dynamic range. Infra-red light is alternatively reflected and absorbed from spokes on the small turbine wheel as it rotates in response to flow. A photo-diode detects the pulses of reflected light and the electronics converts these pulses into a dc voltage that is proportional to the flow. The signal is very stable, repeatable and has no zero drift.

The electronics module provides power to the flow sensor and receives its output signal. It converts the signal, displays it in GPH on a 2 digit LED and provides a 0-5 VDC linear output signal for remote monitoring or data logging. The module also features a user-settable alarm level. If the monitored flow falls below that level, a visual alarm comes on (audible alarm optional) and a digital output (contact closure) is provided.

All the components are mounted in a tough PVC enclosure.

	0.3 - 3.2 GPH (20 - 200 ml/min)
	1.0 - 16 GPH (60 - 1000 ml/min)
	1.6 - 32 GPH (100 - 2000 ml/min)

Download or print a FlowGuard Flow Monitor Brochure (PDF Format)

Download or print a Quote Request Form - Fax or e-mail it to us today for a quote.

FTC - Flange Temperature Controller

Many semiconductor processing systems employ water-cooled flanges to protect the o-rings from burning. The cooling water is typically plumbed directly to the flange with just an in-line metering valve to provide a fixed flow rate. However, the heat load to the flange can vary significantly with process conditions, between door open and door closed, and while pulling a completed run. This results in widely fluctuating flange temperatures which can cause burned o-rings and thermal stress to the flange. Moreover, setting the cooling water flow rate to handle the maximum heat load can result in a flange that is too cold during processing, causing unwanted deposits on the flange and resultant particle problems. The solution is a Flange Temperature Controller from innovative Silicon Systems! The FTC monitors the temperature of the flange and adjusts the cooling water flow accordingly to maintain a constant flange temperature. What could be simpler?

The FTC-D flange temperature controller from iSiS offers a simple, low-cost solution to flange temperature control. Flange temperature is monitored by a thermocouple interfaced to an auto-tune PID controller. The controller regulates the flange temperature to a user-adjustable setpoint by switching a two-state solenoid valve on the cooling water line between normal and trickle flow positions. The FTC-D outputs provide the Host system with either an analog signal corresponding to flange temperature or Lower and Upper Limit alarms.

The iSiS FTC-A provides even greater precision control of flange temperature by utilizing a proportional flow control valve on the cooling water line. Flange temperature is monitored by a thermocouple interfaced to an auto-tune PID controller. The controller regulates the position of the proportional flow control valve to provide a cooling water flow rate commeasurate with the heat load on the flange. The FTC-A also offers greater flexibility, featuring two flange temperature setpoints which can be set remotely, upper and lower temperature alarms and an analog output of the flange temperature. The FTC-A is available as a single (FTC-1A) or dual (FTC-2A) flange controller.

Download or print a FTC Brochure (PDF Format)

Download or print a Quote Request Form - Fax or e-mail it to us today for a quote.

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